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Park Systems Corporation is the global leader in nanoscale microscopy and metrology Solutions.
Park Systems Corporation
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Our comprehensive portfolio features cutting-edge technologies, including atomic force microscopy (AFM) with proprietary True Non-Contact™ imaging, white light interferometry (WLI) for nanometer-scale surface analysis, nano-infrared spectroscopy (nano-IR) for chemical characterization, imaging spectroscopic ellipsometry (ISE) for thin film measurement, and digital holographic microscopy (DHM) for advanced 3D profiling.​

At the forefront of innovation, Park Systems has redefined nanoscale measurement through groundbreaking developments such as high-precision 3D metrology systems and fully automated AFM solutions, all engineered to meet the exacting requirements of both cutting-edge research and high-volume industrial applications.

Our advanced technologies empower critical applications across multiple industries, including scientific research, nanoscale engineering, semiconductor fabrication, display manufacturing process control, advanced packaging, and precision quality assurance.

​ Today, we proudly support global semiconductor leaders, top-tier academic institutions, and premier national laboratories—delivering the accuracy, reliability, and innovation that propel progress at the nanoscale.​
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