Products

Products & Solutions

Park Systems delivers advanced nanoscale metrology solutions across both research and industrial applications. Research AFMs feature a decoupled scanner architecture for distortion-free imaging, while True Non-Contact™ technology preserves tip and sample integrity. The AI-powered SmartScan streamlines operation, providing researchers with intuitive and high-resolution nanoscale measurements. Industrial AFMs are designed for automated, high-throughput environments, offering advanced 3D metrology and fully automated AFM solutions for semiconductor manufacturing, display technology, and quality assurance. In addition to AFMs, Imaging Spectroscopic Ellipsometry (ISE) enables high-resolution optical analysis of microstructured thin films, while White Light Interferometry (WLI) and nanoscale IR spectrometers (AFM-IR) further expand Park Systems’ metrology capabilities. Active Vibration Isolation (AVI) systems enhance measurement stability across both research and industrial applications, minimizing external disturbances to ensure the highest level of accuracy.