Imaging Spectroscopic Ellipsometry
Park Systems’s Imaging Spectroscopic Ellipsometry Combines ellipsometry & optical microscopy for precise microanalysis. Spatial resolution of 1 μm for thin-film and material characterization. Made in Germany
Referenced Spectroscopic Ellipsometry
Park Systems’s Referenced Spectroscopic Ellipsometry Compares sample to reference for precise ellipsometric differences. Single-shot high-resolution spectra & 200 spectra/sec. Made in Germany
Accessories
Park Systems provides a wide range of accessories for imaging ellipsometry