Imaging Spectroscopic Ellipsometry
Park Systems Imaging Spectroscopic Ellipsometers combine ellipsometry and optical microscopy for the accurate characterization of micro-structured thin films. It delivers ellipsometric accuracy with visual mapping of such data over 2D space at down to 1 µm lateral resolution.
Referenced Spectroscopic Ellipsometry
Park Systems Referenced Spectroscopic Ellipsometers provide fast thickness measurements by analyzing changes of ellipsometric data of samples compared to the reference data. It achieves the data acquisition time of 0.05s for thickness measurements without 2D mapping and optical property measurement capability.
Accessories
A wide range of accessories and extensions is available for Park Systems ellipsometry systems, enabling flexible configuration for different measurement tasks.