Park NX-TSH FPD
Industry’s leading AFM for flat panel display ultra large and heavy sample metrology solutions
NX-TSH FPD series is an in-line AFM systems designed for nanometer-scale metrology on large flat panel display (FPD) glass substrates up to Gen 8.6 (2,290 mm × 2,620 mm). During operation, the measurement module rapidly traverses the glass to each target location, where the Tip Scanning Head (TSH) performs fast, high-precision AFM scans for localized surface analysis. These systems are engineered for seamless integration into display fabrication environments.
Built on Park Systems’ proven NX AFM platform, NX-TSH FPD series delivers high-accuracy measurements across ultra-large glass areas and is widely adopted by leading display manufacturers for advanced process metrology.
Key Features
Fully Automated Operation
NX-TSH FPD enables fully automated operation from glass handling to measurement and analysis. The system automatically receives a recipe from the host, performs end-to-end automation, including selecting the appropriate probe, scanning multiple target areas, analyzing measurement data, and generating reports.
Automatic Probe Exchange
The automatic tip exchanger seamlessly replaces the probe when the threshold is exceeded. It can store up to 24 pre-mounted probes (12 probes per cassette).
Designed for OLED, LCD and Other Large Sample Analysis
Park Systems has expanded its AFM capabilities to support large flat panel displays up to Gen 8.6 and beyond with Park NX-TSH FPD. It provides a scan range of up to 100 µm × 100 µm in the XY direction and 15 µm in the Z direction, enabling precise analysis of large display samples. The system also features a flexible chuck designed to accommodate large and heavy glass substrates, making it ideal for OLED, LCD, and other large-sample analyses.
Stationary Substrate with Fast-Moving Measurement Module
NX-TSH FPD enables nanometer-scale topography measurement on large glass substrates. Due to the considerable size and weight
of the glass, the substrate is loaded onto the sample chuck via the EFEM and remains stationary throughout operation, while the measurement module rapidly traverses to the target coordinates using an air-bearing and linear motor system. The Tip Scanning Head within the measurement module then performs high-precision scanning. Additionally, by individually controlling eight separate sample chucks, NX-TSH FPD maintains an ultra-flat sample chuck surface with an overall flatness of less than 20 µm.
Fab Compatibility
NX-TSH FPD ensures optimal compatibility with cleanroom environments in display fabs. The system utilizes dual engineered fan filter units (FFUs)
to generate a consistent downflow, maintaining cleanliness within the equipment and preventing particle contamination on the glass surface.
With this design, NX-TSH FPD achieves ISO Cleanliness Class 1 (ISO 14644-1) (≤10 particles/m³ ≥ 0.1 µm and ≤2 particles/m³ ≥ 0.2 µm) and minimizes particle contamination along the glass movement path through an optimized ventilation system, while maintaining efficient noise shielding.
Easy-to-Use Operation Software XEA
XEA offers practical features such as easy copy/paste of recipes, specialized editing modes, and real-time recipe updates. With built-in functions providing comprehensive system operation—including parameter adjustment, database management, and maintenance—the interface remains straightforward and user-friendly. The navigator provides an intuitive user interface that integrates system adjustment and operation.
Fab Host Communication via SECS/GEM Protocol
The system enables Fab host communication via the Computer Integrated Manufacturing (CIM) communication configured to customer-specific protocols. Various sensor data are uploaded to the Fault Detection & Classification (FDC) system.
Park AFM Technology
Tip Scanning Head (TSH) System
The sample is secured on the chuck while the gantry-mounted tip scanning head moves to desired measurement positions on the sample surface. This tip scanning approach eliminates sample size and weight limitations. The tip scanning head features a fully decoupled XY scanner and Z scanner, enabling precise control in each direction.
Decoupled XY and Z Scanner System
The separated flexure-guided 2D XY scanner and 1D Z scanner system minimizes
out-of-plane motion by eliminating crosstalk between horizontal and vertical motion. The independent Z scanner enables precise, linear, and fast dynamic performance.
Park AFM Technology
True Non-Contact™ Mode
True Non-contact™ mode, a proprietary technology offered by Park Systems, obtains topography by detecting the attractive van der Waals force between the tip and sample surface. The key advantage of True Non-contact mode is the prevention of tip wear and sample damage, ensuring consistent results with superior data reliability. This also reduces the total cost of ownership by extending tip life.
Versatile Applications
Comprehensive 3D Nano-Metrology
Park AFM precisely measures width (critical dimension), pitch, height (depth), taper angle (side wall angle), and surface roughness.
- Width (CD) & Pitch
- Height (Depth)
- Taper Angle (Side Wall Angle)
- Surface Roughness
Advanced OLED Backplane Metrology
NX-TSH FPD is used for TFT backplane measurement in advanced OLED process. Measurement of the trench structure of the TFT backplane is very useful. It is possible to measure and monitor the taper angle, depth, and notch of the trench structure.
- Width: ~ 4 µm
- Taper Angle: 65 ~ 75º
- Height: ~ 1 µm
- Notch: ~ 0.2 µm
Thin Film Transistor (TFT) Backplane Metrology
NX-TSH FPD series is used to measure various structures and layers of TFT backplane. It can measure various hole structures that can monitor contact performance. Width (CD) and height measurements are possible for lines of various layers, and roughness measurements are also possible.
