Park Sample Store
Grating Pattern Calibrator (GPC)
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Option Description
The grating pattern calibrator, GPC is a reference material to check the measurement capability of slope in AFM measurement. It can be used to characterize the scanner nonlinearity in the vertical direction.
Specifications
- Edge angle: 54.7°
- Pitch: 10 μm
- Width: 8 μm
- Step height: 1.75 μm
- Chip size: 5 mm × 5 mm
- Material: Si
- Substrate: Circular coupon (Ф 20 mm)
- Traceability: Not certified
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