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TSC-050
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Tip Shape Checker (TSC-050)
Quotation
Option Description
The tip shape checker, TSC-050 is a reference material to check the shape of the AFM tip apex. If the certified linewidth (WC) is subtracted from the AFM line profile of a TSC-050, the shape of the tip apex can be determined.
Specifications
  • Line width (WC): 50 nm
  • Reference pitch (PR): 250 nm
  • Trench width: 200 nm
  • Pattern depth (D): 100 nm (Not certified)
  • Pattern size: 4 mm × 1.3 mm (Certified area 3 mm)
  • Substrate: Rectangular coupon (9 × 18 mm)
  • Traceability: KOLAS (KRISS) traceable via ISO 17034:2016
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