Name: AFMTC
Brand: Park Systems
Availability: InStoreOnly

Nano Standard Samples

AFM Tip Characterizer (AFMTC)

AFMTC sample consists of 10 Multiple Narrow Trenches (10 ~ 50 nm) and a 50 nm Isolated Line. This sample is designed to evaluate the shape characterization of AFM tips.

Manufactured by Kims Reference Corp. (internationally accredited reference materials producer from ILAC-MRA and KOLAS via ISO-17034)

Quotation

Specifications

Trench widths: 10 / 13 / 16 / 19 / 22 / 26 / 30 / 35 / 40 / 50 nm
Line widths: 50 nm
Step height : 100 nm (not certified)
Pattern length : 4.0 mm (certified region: 3 mm from center)
Material : Polycrystalline silicon
Traceability: KOLAS (KRISS) traceable via ISO 17034:2016

Applications

Tip radius: If the penetration depth of an AFM Tip is deeper than 1/2 of the trench width (W), the radius of the tip is smaller than the half width. Cone angle: Cone angle can be estimated from the “V shape” in the narrow trenches when the tip is closing to the bottom.
Tip replacement: The trench where a normal tip touches the bottom can be used as a reference trench to determine the time to replace.
Tip shape: If the certified linewidth (W꜀) is subtracted from the line profile of an isolated Si line, the tip shape can be directly visualized.
Scale Calibration: The measurement scale of AFM can be calibrated from the ratio of the certified pitch value (Pᵣ) and the measured pitch value (Pₘ).