Name: XSC12-100
Brand: Park Systems
Availability: InStoreOnly

Nano Standard Samples

XYZ Scale Calibrator

XSC12-100 sample consists of multiple pitches (3 μm, 5 μm, 10 μm, 20 μm) and 100 nm height. (Certified) This sample is designed for XY and Z calibration.

Manufactured by Kims Reference Corp. (internationally accredited reference materials producer from ILAC-MRA and KOLAS via ISO-17034)

Quotation

Specifications

Pitch values: 3 / 5 / 10 / 20 μm
Step height: 100 nm
Chip size: 5 mm × 5 mm
Each pattern size: 1 mm × 1 mm
Material: SiO₂ on Si
Substrate: 300 mm wafer (XSC12-100) / 200 mm wafer (XSC08-100)
Traceability: KOLAS (KRISS) traceable via ISO 17034:2016

Applications

Calibration of depth (Z direction)

XSC-100 can be used to calibrate the scale of step-height of industrial AFM from the ratio of the certified step-height (H꜀) and the measured step-height (Hₘ).