Name: SSRM-100
Brand: Park Systems
Availability: InStoreOnly

Nano Standard Samples

SSRM Characterizer (SSRM-100)

The SSRM Characterizer, SSRM-100 is a nanostructure standard with five doping layers sequentially arranged with an activated doping layer width of 5 ~ 40 nm, which is used for SSRM spatial resolution evaluation.

Manufactured by Kims Reference Corp. (internationally accredited reference materials producer from ILAC-MRA and KOLAS via ISO-17034)

Quotation

Specifications

Width of active layer: 5 nm, 10 nm, 20 nm, 30 nm, 40 nm
Spacing of SiO₂: 50 nm
Pattern size: 4 mm
Substrate: Circular coupon (Ф 20 mm)
Traceability: KOLAS (KRISS) traceable via ISO 17034:2016

Applications

SSRM-100 is a CRM to evaluate the characteristics of Scanning Spreading Resistance Microscopy (SSRM). The inactive SiO₂ layers between the active B-doped Si layers can be used to check the operation of SSRM and to evaluate the spatial resolution of SSRM.