Name: SCM-100
Brand: Park Systems
Availability: InStoreOnly

Nano Standard Samples

SCM Characterizer (SCM-100)

The SCM Characterizer, SCM-100 is a standard for verifying the electrical properties at the nanometer level and the operating characteristics of SCM that measures the capacitance of the sample surface.

Manufactured by Kims Reference Corp. (internationally accredited reference materials producer from ILAC-MRA and KOLAS via ISO-17034)

Quotation

Specifications

Doping Type: N-type doped / P-type silicon wafer
Pitch: 5 μm
Line width: 2 μm
Step height: 15 nm
Material: Si
Substrate: Circular coupon (Ф 20 mm)
Traceability: Not certified

Applications

The SCM-100 can be used to determine the charge distribution of the sample by measuring the voltage difference between the applied AFM tip and the surface of the sample, and it can also be used to image the sample and confirm the characteristic values at a nano-size resolution level.

In the SCM measurement mode, Z-height, SCM Amplitude, and SCM Phase items can be measured.