Name: TSC-200
Brand: Park Systems
Availability: InStoreOnly

Nano Standard Samples

Tip Shape Checker (TSC-200)

The tip shape checker, TSC-200 is a reference material to check the overall shape of the AFM tip. If the certified linewidth (WC) is subtracted from the AFM line profile, the shape of the tip can be determined.

Manufactured by Kims Reference Corp. (internationally accredited reference materials producer from ILAC-MRA and KOLAS via ISO-17034)

Quotation

Specifications

Line width (W_C): 200 nm
Reference pitch (P_R): 600 nm
Trench width: 400 nm
Pattern depth (D): 1,000 nm (Not certified)
Pattern size: 4 mm × 1.3 mm (Certified area 3 mm)
Substrate: Rectangular coupon (9 × 18 mm)
Traceability: KOLAS (KRISS) traceable via ISO 17034:2016

Applications

Tip shape: If the certified linewidth (W꜀) is subtracted from the AFM line profile of the isolated Si line, the overall shape of the tip can be directly visualized in the range of 1 μm from the tip apex.
Radius and cone angle: The radius and cone angle of the tip can be determined from the estimated tip shape near the apex.
Scale Calibration: The measurement scale of AFM image can be calibrated from the certified pitch value (Pᵣ).