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Nano Standard Samples
Z Scale Calibrator
ZSC12-200 sample consists of 200 nm step height uniform bar (10 μm, 50 μm wide). (Certified) This sample is designed for Z calibration.

Manufactured by Kims Reference Corp. (internationally accredited reference materials producer from ILAC-MRA and KOLAS via ISO-17034)

Quotation
Specifications
  • Line widths: 10 / 50 μm
  • Step height: 200 nm
  • Chip size: 5 mm × 5 mm
  • Pattern size: 1 mm × 1 mm
  • Material: SiO₂ on Si
  • Substrate: 300 mm wafer (ZSC12-200) / 200 mm wafer (ZSC08-200)
  • Traceability: KOLAS (KRISS) traceable via ISO 17034:2016
Applications
  • Calibration of depth (Z direction)
ZSC-200 is used to calibrate the scale of step-height of industrial AFM from the ratio of the certified step-height (H꜀) and the measured step-height (Hₘ).
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