GPC
Nano Standard Samples
Grating Pattern Calibrator (GPC)
The grating pattern calibrator, GPC is a reference material to check the measurement capability of slope in AFM measurement. It can be used to characterize the scanner nonlinearity in the vertical direction.

Manufactured by Kims Reference Corp. (internationally accredited reference materials producer from ILAC-MRA and KOLAS via ISO-17034)

Specifications
  • Edge angle: 54.7°
  • Pitch: 10 μm
  • Width: 8 μm
  • Step height: 1.75 μm
  • Chip size: 5 mm × 5 mm
  • Material: Si
  • Substrate: Circular coupon (Ф 20 mm)
  • Traceability: Not certified
Applications
  • Calibration of lateral force
GPC is used to characterize the measurement capability of the edge angle in AFM measurement. The lateral force can be calibrated by analyzing the contact response measured on the flat and sloped facets.
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